Abstract:A simple method compatible with all geometrical structures of terahertz metamaterials for enhancing the tunability, sensitivity, Q-factor, and figure of merit (FOM) is proposed. This method uses a multi-layer SiO2:Ag to approach the floating-like double split ring resonators. The terahertz metamaterial consists of five layers of SiO2:Ag, in which each layer of SiO2:Ag comprises a 250-nm-thick SiO2 layer and a 50-nm-thick Ag layer. The tunability, sensitivity, Q-factor, and figure of merit (FOM) of metamaterial can be increased with increasing the number of layers of SiO2:Ag. Metamaterial with multi-layer SiO2-Ag has a larger tunability, sensitivity, Q-factor, and figure of merit (FOM) than the common metamaterial based on a single metal layer. The multi-layer metamaterial is an excellent achievement in developing biomolecule biosensors and can potentially sense dangerous viruses.

High sensitivity terahertz metamaterial biosensor based on multilayer SiO2-Ag