Abstract:This paper presents a novel mechanical material removal method to produce nanostructures with a precise control of their three dimensional (3D) surface topography. The method employs the tip of an atomic force microscope (AFM) probe as the cutting tool and a closed-loop high precision stage to control the machining path of the tip. In this approach, the tip only describes vertical motions while the stage is actuated along lateral directions in a raster scan strategy. The machining of features with 3D nanoscale topography in this way is the combined result of the tip applying a constant normal load on the sample while varying the distance (i.e. the feed) between two parallel lines of cut. More specifically, an increased feed leads to a reduced machining depth and vice-versa. Thus, the main difference with mechanical milling or turning at such small scale is that this method relies on the control of the feed to determine the machined depth. To support the interpretation of the process outcomes, an analytical model is developed. This model expresses the relationship between the feed and the machined depth as a function of the contact area between the tip and the material. The critical achievable slope of produced nanostructures was derived from this model and validated using experimental tests. This parameter corresponds to the maximum inclination of the surface of a nanostructure that can be machined with the proposed method. From the knowledge of the critical slope, the machining of periodic nanostructures was demonstrated on a single crystal copper workpiece. In principle, the method reported here could be implemented to any instrument with micro- and nano-indentation capabilities by exploiting their load-control feedback mechanism.

Fabrication and Measurement of Nanostructures on the Micro Ball Surface Using a Modified Atomic Force Microscope.

A Novel AFM-based 5-Axis Nanoscale Machine Tool for Fabrication of Nanostructures on a Micro Ball.

Towards High Accuracy Surface Profile Characterization in Atomic Force Microscopy

Nano-fabrication System Based on Atomic Force Microscopy

Fabrication of Large Scale Nanostructures Based on a Modified Atomic Force Microscope Nanomechanical Machining System.

Investigation on AFM-based Micro/nano-Cnc Machining System

Measurement of Sub-Surface Microstructures Based on a Developed Ultrasonic Atomic Force Microscopy

AFM tip-based mechanical nanomachining of 3D micro and nano-structures via the control of the scratching trajectory

Measurement of Roundness and Sphericity of the Micro Sphere Based on Atomic Force Microscope

Fabrication of millimeter scale nanochannels using the AFM tip-based nanomachining method

On-machine Measurement of a Slow Slide Servo Diamond-Machined 3D Microstructure with a Curved Substrate

AFM Tip-Based Fabrication of Silicon Nanostructures with Reduced Subsurface Amorphous Layers

Force Servo Nano-Precision Diamond Cutting of Freeform Surfaces on a Micro-Precision Machine

Machining complex three-dimensional nanostructures with an atomic force microscope through the frequency control of the tip reciprocating motions

RESEARCH ON MICRO/NANO-MACHINING USING AN ATOMIC FORCE MICROSCOPE COMBINED WITH DIAMOND TIP

Novel Micro-Machining Method Basing on AFM and High-Accuracy Stage

Research on Micro Machining Using AFM Diamond Tip

Nontraditional Manufacturing Technique - Nano Machining Technique Based on Spm

Profile Measurements of Micro-Aspheric Surfaces Using an Air-Bearing Stylus with A Microprobe

Polymer Nanostructured Components Machined Directly by the Atomic Force Microscopy Scratching Method

Recent Advances in AFM Tip-Based Nanomechanical Machining