Characteristics of Thickness-Shear Modes Excited by Two-Layer Piezoelectric Film in Acoustic Sensors

Hui Zhang,Shu-yi Zhang,Li Fan,Yu-ran Wang
DOI: https://doi.org/10.1063/1.3681187
IF: 2.877
2012-01-01
Journal of Applied Physics
Abstract:The thickness-shear mode (TSM) excited by two-layer, (112¯0)-textured, hexagonal piezoelectric film is studied to improve the performances of the acoustic sensors. The corresponding theoretical model is presented by the acoustic wave propagation theory in multi-layer structure combined with the excitation of TSM in two-layer piezoelectric film with opposite polarization direction. The model considers the effects of the acoustic attenuations in the Akheiser regime and Landau-Rumer regime. The calculated results manifest that, when the phase variation of two-layer piezoelectric film with opposite polarization direction is the same and equals to π, an enhanced second TSM can be excited and the corresponding first TSM is suppressed. The enhanced second TSM has higher resonant frequency and higher quality factor than the first TSM excited by a single- or two-layer piezoelectric film with identical polarization direction, which can be used for improving the mass sensitivity and sensitive resolution of the acoustic sensors in a liquid medium.
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