Abstract:The resonant sensor is a kind of high-sensitivity and high-stability sensor that directly outputs digitalsignals. The resonance sensitive elements of traditional resonant sensors are mostly made of metal, quartzcrystal, silicon and other materials. However, with the development of resonant sensor toward theminiaturization and intellectualization, the sensitive materials of new resonator are micro-nano machined andhighly sensitive. As a new type of two-dimensional nanomaterial, graphene has the great potentials in the fieldof resonance sensing because of its excellent mechanical, electrical, optical and thermal properties. Therefore,the mechanical quantity sensor based on graphene material is expected to surpass the silicon materialmechanical quantity sensor in many aspects such as micro-nano size, high performance, and environmentaladaptability. This review focuses on the graphene resonant mechanical quantity sensor. In the first part, wesummarize the basic properties, preparation methods, and transfer methods of graphene materials. Thepreparation and transmission methods of graphene are key to high-performance graphene resonator, but thereare still different problems in the preparation and transfer of graphene, which also greatly restricts thedevelopment of graphene resonator. In the second part, the basic theory of resonant sensors is given, and thecommon methods of transferring graphene films are introduced in detail. Then the theoretical and experimental studies of graphene resonator are discussed. For example, the theoretical studies of graphene resonator areinvestigated by using the classical elastic theory, non-local elastic theory, molecular structure mechanics andmolecular dynamics. Then the effects of graphene preparation method, graphene layer number and shape,excitation and detection methods on the resonance performance are estimated in the resonant experiments ofgraphene resonators. After that, the research progress of graphene resonator is summarized in the fields ofpressure, acceleration and mass sensors. Compared with traditional silicon resonators, graphene resonators havea small dimension and demonstrate preferable resonant performance under low-temperature and low-pressureconditions. In this case, the technical issues of graphene resonant sensor are introduced to emphasize theimportance of suspended graphene film transfer, structure fabrication of harmonic oscillator and vibrationexcitation/detection of resonators, which contributes to the potential applications in the fields of aerospace,intelligent detection and biomedical sensing for graphene resonant sensors

Electrical Read out of Nano-Electromechanical System Signal by Using Graphene Resonant Channel Transistor

Performance of Monolayer Graphene Nanomechanical Resonators with Electrical Readout

Graphene nanoelectromechanical resonators for detection of modulated terahertz radiation

Simultaneous Electrical and Optical Readout of Graphene-Coated High Q Silicon Nitride Resonators

Electrical Actuation and Readout in a Nanoelectromechanical Resonator Based on a Laterally Suspended Zinc Oxide Nanowire

Coupling graphene nanomechanical motion to a single-electron transistor.

Local-gate Electrical Actuation, Detection, and Tuning of Atomic-Layer M0S2 Nanoelectromechanical Resonators

A Review on Graphene-Based Nano-Electromechanical Resonators: Fabrication, Performance, and Applications

A Graphene Field Effect Transistor Driven by a MEMS Lamb Wave Resonator

Research Progress of Electromechanical Graphene Resonant Sensors

All-electrical Readout of Atomically-Thin MoS2 Nanoelectromechanical Resonators in the VHF Band

Chemical Vapour Deposition Graphene Radio-Frequency Field-Effect Transistors

Graphene-Based Nanoresonator with Applications in Optical Transistor and Mass Sensing

Optically Assisted FM Demodulation of a Graphene Resonator

Research Progress of Graphene Radio Frequency Devices

Electrolyte gate dependent high-frequency measurement of graphene field-effect transistor for sensing applications

Graphene Nanoelectromechanical System and Its Integration with Optical Fiber

Research Progress of Graphene Nano-Electromechanical Resonant Sensors—A Review

Single electron tunneling through high-Q single-wall carbon nanotube NEMS resonators

Accessing nanomechanical resonators via a fast microwave circuit

A High-Frequency Compact Model for Graphene Resonant Channel Transistors Including Mechanical Nonlinear Effects