Compensation of defocus phase aberrations in in-situ off-axis digital holographic microscopy

Hai Lei,Yanan Zeng,Xiaodong Hu,XiaoTang Hu
2012-01-01
Abstract:Digital holographic microscopy allows fast, nondestructive, full field, high-resolution quantitative amplitude and phase contrast so that it is widely used in many applications. It is necessary to correct the phase aberrations of digital holographic microscopy during the precise measurement. In this paper, we present a new method for compensate the phase aberrations by using the cooperative process of the numerical simulation of the reference wave front and the adjustment of the reference beam. The numerical simulation of the reference wave front is used for getting the replica of the reference wave front and the adjustment of the reference beam is used for compensating the aberrations of the setup which lead a precise measurement. The surface profiles of two microstructures are measured for evaluating the feasibility of the compensation method.
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