Abstract:Fault detection technique is essential for improving overall equipment efficiency of semiconductor manufacturing industry. It has been recognized that fault detection based on k nearest neighbor rule (kNN) can effectively deal with some characteristics of semiconductor processes, such as multimode batch trajectories and nonlinearity. However, the computation complexity and storage space involved in neighbors searching of k NN prevent it from online monitoring, especially for high dimensional cases. To deal with this difficulty, principal component-based k NN has also been presented in literature, in which dimension reduction is done by principal component analysis (PCA) before k NN rule implemented to fault detection. However, dimension reduction by PCA may distort the distances between pairs of samples (trajectories). Thus the false alarm and missing detection of k NN for fault detection may increase in principal component subspace because PCA fails to preserve pairwise distances in subspace. To overcome this drawback, we propose a new fault detection method based on random projection and k NN rule, which combines the advantages of random projection in distance preservation (in the expectation) and k NN rule in dealing with the problems of multimodality and nonlinearity that often coexist in semiconductor manufacturing processes. An industrial example illustrates the performance of the proposed method.

Run-to-run Fault Detection Based on ARX Model and PCA for Semiconductor Manufacturing Processes

Fault diagnosis in industrial processes using principal component analysis and hidden Markov model

Fault Detection Using Random Projections and k-Nearest Neighbor Rule for Semiconductor Manufacturing Processes

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Development of Decay Based PLS Model and Its Economic Run-to-Run Control for Semiconductor Processes

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Faults Diagnosis in Industrial Reheating Furnace Using Principal Component Analysis

Adaptive Partitioning Pca Model for Improving Fault Detection and Isolation

Investigation of Dynamic Multivariate Chemical Process Monitoring

Fault Detection and Diagnosis in Continuous Dynamic Multivariable Processes Using Independent Component Analysis

Random projection based k Nearest Neighbor rule for semiconductor process fault detection

Switching Autoregressive Dynamic Latent Variable Model for Fault Detection in Multimode Processes

Switched Fault Diagnosis Approach for Industrial Processes Based on Hidden Markov Model

Multimode Process Monitoring Based on Switching Autoregressive Dynamic Latent Variable Model

A Robust and Sparse Process Fault Detection Method Based on RSPCA.

Kernel Generalization of Multi-Rate Probabilistic Principal Component Analysis for Fault Detection in Nonlinear Process

Multi-Rate Factor Analysis Models for Fault Detection in Multi-rate Processes

Semiconductor Manufacturing Process Monitoring Based on Adaptive Substatistical PCA

Robust Self-Supervised Model and Its Application for Fault Detection

Fault Detection with Improved Principal Component Pursuit Method

Fault modeling and prognosis based on combined relative analysis and autoregressive modeling