Magnetron Sputtering Applied in Ni-Mn-Ga Films Preparation

Jiazi Shi,Chuanzhong Chen,Xing Dang
DOI: https://doi.org/10.4028/www.scientific.net/amr.569.7
2012-01-01
Advanced Materials Research
Abstract:Shape memory alloys (SMAs) thin films have attracted much attention in recent years as intelligent and functional materials because of their unique properties. Ferromagnetic shape memory alloys (FSMAs) show large straining output, high impetus and short response time induced by the magnetic field, compared with traditional shape memory alloys. In this paper, Ni-Mn-Ga ferromagnetic shape memory alloys flims prepared by magnetron sputtering are introduced, and the research direction of Ni-Mn-Ga films is presented.
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