Abstract:A fully integrated optical and electrical measurement system made of off-the-shelf optical components and electrical instruments that characterizes the micro motions for MEMS dynamic performance at the wafer/die level automatically is presented. Both periodic and non-periodic in-plane micro motions could be measured by the blur-synthesis method based on the machine vision technology. The periodic out-of-plane micro motions could be estimated by the laser stroboscopic phase-shifting interferometry with the digital image processing technology. Some improved algorithms together with the sub pixel method and 2D waveform transform technology are bought forward and experimented for the measurement of micro motions with higher resolution. The methods could measure micro motions up to tens of KHz in real time with nano resolution and the characterization is both in situ and nondestructive. Based upon the virtual instrument technology, the measurement system with friendly user interfaces, open hardware and software architectures and expansible features could be used practically in MEMS R&D field and more improvements to this system could be made continually.

Motion Measurement Method of MEMS Based on Micro-Image Processing

Optical Image Mosaic Methods Based on MEMS Gyroscope

Image Stabilization Using Motion Estimation and Micro-mechanical Compensation

Measurement of In-Plane Motion for MEMS Based on Sub-Pixel Synthetical Orientation and Matching Algorithm

Measurement Technique of In-plane Motion for MEMS Based on Machine Micro-vision

Measurement Technique of In-Plane Motion for MEMS Based on Blur Image Synthesis

Nanoscale Measurement of MEMS In-Plane Motion Based on Block Matching

A new algorithm of MEMS displacement measurement based on gray scale

Measurement of Angular Velocity in MEMS by Optical Method

Application of machine micro-vision in testing in-plane motions for MEMS micro-structures

Mems Motion Measurement System Using Differential Laser Doppler and Its Key Techniques

Integrated Measurement Of Micro Motions For Mems Dynamic Performance Analysis

Measurement of MEMS In-Plane Motion Based on Fuzzy Set and Wavelet Transformation Technique

The Application of Computer Micro-vision to Micro-motion Measurement

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

A Differential Laser Doppler System for MEMS Motion Measurements

In-plane Micro-Motion Measurement with High Accuracy Based on Computer Microvision

Design and Implementation of Measurement System for Out-of-plane Micro-Motions of MEMS Structures

Micro-Motion Measurement of MEMS Based on Harmonious-Synchronous-Control Method

Measuring In-plane Motion of Micro-MEMS Based on Optical Flow

Micro-Motion Analyzer Used for Dynamic Mems Characterization