Ultrasonic Vibration-Assisted Grinding of Micro-Structured Surfaces on Silicon Carbide Ceramic Materials

B. Guo,Q-L Zhao,M. J. Jackson
DOI: https://doi.org/10.1177/0954405411423574
2012-01-01
Abstract:Precision grinding of silicon carbide ceramic micro-structured moulds is becoming more common in the area of the moulding of glass materials. However, in micro-structured grinding of super-hard and brittle materials, problems frequently occur in terms of chipping and rounding of micro-structural edge features. In order to overcome these technological constraints, a promising method using ultrasonic vibration of workpiece materials is proposed. The design of a novel ultrasonic vibration apparatus and the experimental investigation of ultrasonic vibration assisted grinding of SiC micro-structures are presented. The experimental results show that the application of ultrasonic vibration can enhance the ground surface quality and improve the edge features of micro-structures.
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