Atmospheric Pressure Low Temperature Plasma Jet Assisted by the Preionization and Its Application on Surface Cleaning

金英,钱牧扬,任春生,王德真
2012-01-01
Abstract:We investigated an atmospheric pressure nonequilibrium mixtures by specially designed presented its application in oil equipment with two coaxial quartz removal from material surface. By argon/oxygen plasma jet generated in Oz/Ar capillaries and double power electrodes, and taking the syringe needle plasma as its pre- ionization source to supply seed electrons for the hybrid barrier-jet discharge, uniform discharge mode with a lower breakdown voltage even when the ratio of oxygen in argon was up to 6 ~ could be generated. The Boltzmann's plot was performed by time-averaged optical emission spectroscopy to evaluate the excitation electron temperature, showing that the value is 2678 K, meanwhile, the gas temperature was from 390 K to 440 K measured by a fiber thermometer. The concentration of atomic oxygen was estimated by actinometry to be about in an order of magnitude of 10I7 cm-3. The jet was then employed to oil removal from glass surfaces and a maximum cleaning rate of 0. 1 mm/s was achieved. Results show that the preionization technology is an effective method to generate atmospheric pressure uniform discharge plasma jet with high plasma chemistry activity, and the jet can be applied to oil removal from material surface effectively.
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