Removal of SO2F2 by the Packed Bed Dielectric Barrier Discharge Plasma

郑其锋,聂勇,顾大勇,黄彤文,童星,计建炳
2012-01-01
Abstract:Alumina and quartz glass balls were chosen as filling dielectric, and the packed bed dielectric barrier discharge (DBD) plasma was adopted to realize the harmless treatment Of sulfuryl fluoride (SO2 F2). The effects of discharge voltage and energy density on the removal efficiency of SO2F2 filled with different dielectrics were investigated, respectively. Meanwhile, the removal products and mechanism of SO2 F2 filled with different dielectrics in the DBD reactor were analyzed. Results showed that alumina dielectric was more effective for SF2O2 harmless treatment, and SF2Oz2 could be completely removed when the energy density was above 208 J/L. Compared with packing quartz glass balls, the energy consumption of packing alumina ball decreased by 50%. SOz F2 was degraded into SO2, S and SiF4 when quartz glass balls was filled in the DBD reactor. In terms of alumina dielectric, the harmful gaseous products after plasma treatment could be completely reacted and absorbed by alumina to realize the harmless treatment of SF2O2.
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