Abstract:In order to break through the conductive percolation threshold limitation of the conventional granular films to increase resistivity (ρ), while keeping large complex permeability (μ̃), a series of compositionally graded FeCoB-SiO2 granular films with different multilayer structures were deposited on flexible substrates. The high-frequency electromagnetic properties were investigated. The experimental results showed that the compositionally graded granular films had obvious in-plane uniaxial magnetic anisotropy and the coercivity in the easy axis (Hce) was as low as 3.97 Oe. Both the ρ (∼15.4 mΩ·cm) and μ̃ (μi'=276.3 and μ″max=441.4) of the compositionally graded FeCoB-SiO2 granular films were simultaneously higher than those of the conventional FeCoB-SiO2 granular films. Two resonance peaks of complex permeability spectrum were also observed.

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