Hydrogen Adsorption Induced Metallization of SiC Surface

CHANG Hao,YANG Li,WANG Li-Jun,WU Jian,DUAN Wen-Hui
DOI: https://doi.org/10.3321/j.issn:0379-4148.2005.12.006
2005-01-01
Physics
Abstract:We report our recent theoretical studies on the hydrogen-induced semiconductor surface metallization observed in β-SiC(001)-3×2 surface.We show that the surface metallization arises from a novel mechanism of n-type doping of surface band via formation of hydrogen bridgebonds(i.e.,Si-H-Si complex).The hydrogen strengthens the weak Si-Si dimers in the subsurface by forming hydrogen bridge bonds,and donates electron to the surface conduction band.
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