Abstract:The demand for high-performance devices that are used in electrochemical energy conversion and storage has increased rapidly. Tremendous efforts, such as adopting new materials, modifying existing materials, and producing new structures, have been made in the field in recent years. Atomic layer deposition (ALD), as an effective technique for the deposition of conformal and thickness-controllable thin films, has been widely utilized in producing electrode materials for electrochemical energy devices. Recent strategies have emerged and been developed for ALD to construct nanostructured architectures and three-dimensional (3D) micro/nanostructures. These strategies emphasize the preparation of active materials for devices such as batteries and supercapacitors or as catalysts for hydrogen evolution. Additionally, ALD is considered to have great potential in practical industrial production. In this review, we focus on the recent breakthroughs of ALD for the design of advanced materials and structures in electrochemical energy devices. The function and merits of ALD will be discussed in detail from traditional thin film depositions for the coating and engineering/modification layers to complex 3D micro/nanostructures that are designed for active materials. Furthermore, recent works regarding metal–organic framework films and transition metal dichalcogenide films, which were prepared with the assistance of ALD oxide, will be highlighted, and typical examples will be demonstrated and analysed. Because it is within a rapidly developing field, we believe that ALD will become an industrial deposition method that is important, commercially available, and widely used in electrochemical energy devices.Graphical Abstract

Progresses on Applications of Atomic Layer Deposition in Solar Cells

Atomic Layer Deposition for Photovoltaics: Applications and Prospects

Atomic Layer Deposition and Its Applications in Optical Thin Films

Emerging Atomic Layer Deposition Technology toward High-<i>k</i> Gate Dielectrics, Energy, and Photocatalysis Applications

Atomic Layer Deposition for Nanomaterial Synthesis and Functionalization in Energy Technology

Atomic Layer Deposition of Metal Oxides in Perovskite Solar Cells: Present and Future

Advanced Applications of Atomic Layer Deposition in Perovskite‐Based Solar Cells

Atomic Layer Deposition for Electrochemical Energy: from Design to Industrialization

Atomic Layer Deposition for Quantum Dots Based Devices

Atomic Layer–deposited Nanostructures and Their Applications in Energy Storage and Sensing

Recent Advances in the Applications of Elemental Two-dimensional Materials and Their Derivatives Serving As Transport Layers in Solar Cells

Atomic Layer Deposition of Functional Layers in Planar Perovskite Solar Cells

Atomic Layer Deposition-Derived Nanomaterials: Oxides, Transition Metal Dichalcogenides, and Metal–Organic Frameworks

Recent Developments in Atomic Layer Deposition of Functional Overlayers in Perovskite Solar Cells

Atomic Layer Deposition of Nanostructured Materials for Energy and Environmental Applications

Atomic Layer Deposition for Advanced Nanomanufacturing

S0884291419003297 701..719

Research progress of atomic layer deposition technology to improve the long-term stability of perovskite solar cells

Research Progress of Buffer Layer and Encapsulation Layer Prepared by Atomic Layer Deposition to Improve the Stability of Perovskite Solar Cells

Atomic/molecular layer deposition for energy storage and conversion

Atomic Layer Deposition of Thin Films: from a Chemistry Perspective