Study on Composite Phase Measuring Profilometry

YUE Hui-min,SU Xian-yu
DOI: https://doi.org/10.3969/j.issn.0253-2743.2006.01.012
2006-01-01
Abstract:Recently a composite pattern is reported which consist of four shifting patterns spatially modulated by four different carrier frequencies along orthogonal dimension,perpendicular to the phase dimension.Only one such pattern can recover the depth.This method is called composite phase measuring profilometry(CPMP).In this paper,we have a further study about CPMP,and compare CPMP with phase measuring profilometry(PMP) on the aspects of experiments and theories.In this paper the measurement precision and application range of CPMP is illuminated,and it is denoted that CPMP have a big foreground on the dynamic object with no sharp height variation.It is significant for the application of composite phase measuring profilometry.
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