Abstract:Plasma-enhanced chemical vapor deposition (PECVD) is a versatile technique for growing well-aligned, precisely patterned, multiwalled carbon nanotubes directly on substrates. We report on the characterization of PECVD deposited nanotubes using Auger Electron Spectroscopy (AES); we believe that this is the first comprehensive AES study of nanotubes and the effect of the deposition process on the substrate. The nanotubes contained well-crystallized graphitic carbon, in contrast to the amorphous/disordered carbon byproduct which is condensed on the substrate surface. By adjusting the deposition gas ratios, we show, using depth-profiled composition analysis, that it is possible to eliminate the unwanted amorphous carbon on the substrate surface. However, a 5 nm interfacial layer, which contained the plasma species, was always present on the substrate surface due to its exposure to the plasma. We could prevent the formation of this interfacial layer by shielding areas of the substrate from the plasma to achieve truly byproduct free deposition. This technique has allowed us to fabricate promising microelectronic field emission devices using vertically aligned carbon nanotubes.

Investigation of Carbon Nanotube Deposits and Their Formation Conditions by an Arc-Plasma Method in Water

Effects Of Corona Discharge On The Surface Structure, Morphology And Properties Of Multi-Walled Carbon Nanotubes

In-situ studies of electron field emission of single carbon nanotubes inside the TEM

Pressure Effects on Nanotubes Formation Using the Submerged Arc in Water Method

Morphology of Carbon Nanotubes Prepared by Carbon Arc

Synthesis Of Large Quantity Single-Walled Carbon Nanotubes By Arc Discharge

Carbon Nanotubes Grown on the Surface of Cathode Deposit by Arc Discharge

Study of Multi-Walled Carbon Nanotube Structures Fabricated by PMMA Suspended Dispersion

Analysis of the Carbon Nano-Structures Formation in Liquid Arcing

Plasma Enhanced Chemical Vapour Deposited Carbon Nanotubes for Field Emission Applications

Characterization of Plasma-Enhanced Chemical Vapor Deposition Carbon Nanotubes by Auger Electron Spectroscopy

Formation of carbon nanotubes in water by the electric-arc technique

Preparation of Large Amounts of Carbon Nanotubes in Hydrogen Atmosphere by Arc-Discharge

Morphologies and Microstructures of Carbon Nanotubes Prepared by Self-Sustained Arc Discharging

A Novel Method to Produce Large Amount Single-Walled Carbon Nanotubes by Arc Discharging

Influence of magnetic field parallel to the arc on the formation of carbon nano-materials by arc discharge in water

Purification and characterization of single-walled carbon nanotubes produced by arc-discharge

Plasma Composition During Plasma-Enhanced Chemical Vapor Deposition of Carbon Nanotubes

Research on the influence of arc discharge conditions on the formation of carbon Nano-materials

Effect of Carbon Deposits on the Reactor Wall During the Growth of Multi-Walled Carbon Nanotube Arrays

Investigation of Preparation Parameters of Carbon Nanotubes