Abstract:A brief overview is given on several aspects of applications of the Monte Carlo (MC) simulation method to surface-related electron spectroscopy and microscopy. For the MC modeling of electron interaction with solids, the electron inelastic scattering cross section is calculated by the use of bulk dielectric function with optical constants in a dielectric functional approach. This has enabled the systematic reproductions of the experimental energy distributions of backscattered electrons for a number of elemental materials. An improved calculation of backscattering factor for quantitative AES analysis has been performed on the basis of a new definition and by making use of the up-to-date relevant cross sections. The physical reason is given for the backscattering factor that can be less than unity for very low primary energies close to the ionization energy and/or for large incident angles. For the MC modeling of electron interaction with surfaces, the inelastic scattering of electrons moving in a surface region is treated in a self-energy formalism. The model has enabled the evaluation of the surface excitation effect through the calculation of position-dependent electron IMFP. A simulation of REELS spectra for Ag is compared with an experiment; a reasonable agreement found on the surface plasmon peak intensity normalized with elastic peak intensity thus verifies this modeling of electron interaction with surfaces. Finally, the MC simulation code has been extended to deal with complex sample geometries. By using basic building blocks to construct a complex geometry and the ray-tracing technique for correction of electron flight-step-length sampling, the structured and/or inhomogeneous sample can be modeled with reasonable flexibility. Copyright (C) 2006 John Wiley & Sons, Ltd.

Inelastic Scattering of Electrons at Real Metal Surfaces

Self-energy in Surface Electron Spectroscopy: II. Surface Excitation on Real Metal Surfaces

Monte Carlo Simulation Study Of Reflection-Electron-Energy-Loss-Spectroscopy Spectrum

Calculation of Electron-Surface Inelastic Interaction Cross-Section and Monte Carlo Simulation of Surface Excitation

Self-energy in surface electron spectroscopy: I. Plasmons on a free-electron-material surface

Surface Boundary Effect in Electron-Solid Interactions

Surface Excitation Probabilities in Surface Electron Spectroscopies

Monte Carlo Simulation Study of Electron Interaction with Solids and Surfaces

Quantification of Surface Effects in Electron Spectroscopy

Monte Carlo simulation study on surface electronic excitation of precious metals

Monte Carlo Simulation Study of Quasi-Elastic Electron Scattering from an Overlayer/Substrate System

Inelastic scattering of transversely structured free electrons from nanophotonic targets: Theory and computation

Theory of inelastic lifetimes of surface-state electrons and holes at metal surfaces

Electron Scattering in Solids

Kinetic Electron Emission Induced by Grazing Scattering of Heavy Ions from Metal Surfaces

Quantification of Surface Effects: Monte Carlo Simulation of REELS Spectra to Obtain Surface Excitation Parameter

Reflection Electron Energy Loss Spectrum Of Surface Plasmon Excitation Of Ag: A Monte Carlo Study

Theory of spin-polarized high-resolution electron energy loss spectroscopy from nonmagnetic surfaces with a large spin-orbit coupling

Reflection of H+(2 keV) Ions from Metallic Surfaces: Transport Theory Calculation of the Reflection Probability with the Mean Energy Approximation

Monte Carlo Calculation of Electron Rutherford Backscattering Spectra and High-Energy Reflection Electron Energy Loss Spectra

Simulation Study of Electron Beam Induced Surface Plasmon Excitation at Nanoparticles