On-line detection system of film thickness based on infrared technology

HE Ping,CAO Sheng-mei,LI Qi,HUA Nan
DOI: https://doi.org/10.3969/j.issn.1672-0946.2013.06.009
2013-01-01
Abstract:The principle of film thickness detection based on infrared transmission was presented.Then signal acquisition and computing system for the film thickness was designed with TMS320F2812.The system consists of the signal acquisition,the signal modulating,the A/D converting and serial communication circuits.The human-computer interaction system was designed to realize the real-time display of data.The results showed that detection system of film thickness based on infrared technology can realize the real-time detection for film thick-ness,and have advantages of high precision,strong resistance to interference,and well human-computer interface.The functions and indexes achieved the design requirements.
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