Three-Dimensional Non-Silicon Microfabrication for Millimeter Wave Slot Antenna

Lu Wenjing,Su Zhijuan,Ding Guifu
DOI: https://doi.org/10.3969/j.issn.1671-4776.2010.04.010
2010-01-01
Abstract:A three-dimensional non-silicon microfabrication process is developed to fabricate millimeter wave thin film slot antennas,which are composed of suspended,multi-layers structures with various materials.Three processes including a conventional process,a so-called additive and a subtractive processes are introduced to bind the metal structures with a microwave dielectric substrate,and their capabilities of fabricating multi-layered structures are compared.Next,several materials are investigated as the sacrificial material to realize suspended structures.Finally,a broadband unidirectional CPW-fed rectangular slot antenna was fabricated and characterized to validate the feasibility of the presented process.
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