Effects of enhanced nucleation on the growth and thermal performance of diamond films deposited on BeO by hot filament CVD technique

Zhi-ming Yu,Mei Fang,Zhu Xiao
DOI: https://doi.org/10.1007/s11706-008-0068-7
2008-01-01
Frontiers of Materials Science in China
Abstract:A method of controlling the feeding concentration of methane was applied in a hot-filament chemical vapor deposition (HFCVD) in order to improve the nucleation of diamond on the beryllium oxide substrates. The nucleation density and the morphologies of diamond were investigated by scanning electron microscopy (SEM) and atomic force microscopy (AFM) while the thermal conductivities of substrates and the composites were detected by laser-diathermometer. The results show that the diamond thin film is in larger grain size with lower roughness when CH 4 and H 2 enter the chamber, respectively, rather than as a mixture, and the composites’ conductivity soared by 21%–31% compared with BeO substrates. At the conditions of separated gas entry, several projects with changes of the CH 4 flux during depositing were designed to discuss the influence of CH 4 concentration on diamond nucleation. The uniform and compact diamond thin films were acquired when the ratio of CH 4 :H 2 at nucleation stage was in the range of 4%–8%.
What problem does this paper attempt to address?