Effect of Laser Repetition Frequency on the Structural and Optical Properties of ZnO Thin Films by PLD

Wang Zhaoyang,Sun Liyuan,Hu Lizhong
DOI: https://doi.org/10.1016/j.vacuum.2010.07.015
IF: 4
2010-01-01
Vacuum
Abstract:ZnO thin films were grown on Si (1 1 1) substrates by pulsed laser deposition (PLD) at various laser repetition frequency in order to investigate the structural and optical properties of the films. The optical properties of the films were studied by photoluminescence spectra using a 325 nm He-Cd laser. The structural properties of the films were investigated by XRD measurement. The results suggest that films grown at 5 Hz have excellent UV emission and high-quality crystallinity. Laser repetition frequency can affect the structural and optical properties obviously. In addition, the thickness of all samples is about 200 nm and is not as expected that the film thickness was in direct proportion to laser repetition frequency. The authors think that one laser pulse is not corresponding to one growth instantaneousness. There is a growth ambience containing essential components and partial pressure in the work cavity. (C) 2010 Elsevier Ltd. All rights reserved.
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