Abstract:High‐quality crystalline micro‐ and nanostructures based on inorganic semiconductors including zinc oxide (ZnO) have attracted considerable interest in electronic and optoelectronic applications due to their outstanding properties. ZnO micro‐ and nanocrystals can be fabricated by the moderate and high throughput hydrothermal synthesis. Yet it is restricted by patterning large‐area ZnO crystals with high‐quality and programmable geometries through the hydrothermal process for the optoelectronic integration. Here, a capillary‐bridge manipulation approach is demonstrated to control the dewetting process of ZnO precursor solution for patterning precursor arrays. Based on precursor arrays, vertically aligned high‐quality ZnO microrod arrays with homogeneous morphology and pure crystallographic orientation are fabricated via a hydrothermal epitaxial method. Statistical results and crystallization theories guide the experimental optimization and discussion of the crystallization mechanism, dominated by the competition between homogeneous nucleation and heterogeneous nucleation. High‐quality ZnO microbelt arrays are achieved through a surfactant‐mediated hydrothermal method after ZnO microrod arrays are transferred to a polydimethylsiloxane substrate. Photodetectors based on ZnO microbelts exhibit a high responsivity of 2.3 × 104 A W−1, a light on–off ratio exceeding 105, and stable recyclability. It is anticipated that this work provides new insights into patterning inorganic high‐quality micro‐ and nanostructures for multi‐functional integrated devices.

Heteroepitaxial Patterned Growth of Vertically Aligned and Periodically Distributed ZnO Nanowires on GaN Using Laser Interference Ablation

Large area laser interference patterning for periodic growth of individual ZnO nanowires

Wafer-scale High-Throughput Ordered Growth of Vertically Aligned ZnO Nanowire Arrays.

Heteroepitaxial Growth of ZnO Nanorod Arrays on GaAs (111) Substrates by Electrochemical Deposition

Low-temperature Heteroepitaxy of Morphology-controlled ZnO Mirco/Nanorod Arrays on GaN Substrates

Alignment-controlled Hydrothermal Growth of Well-Aligned ZnO Nanorod Arrays

Controlled Growth of Well-Aligned Zno Mirco/Nanorod Arrays on Gan Substrates Using A Novel Solution Method

From powder to nanowire: A simple and environmentally friendly strategy for optical and electrical GaN nanowire films

Systematic study of vertically aligned ZnO nanowire arrays synthesized on p-GaN substrate by hydrothermal method

Controlled Epitaxial Growth of Vertically Well-Aligned ZnGa2O4 Nanowire Arrays on Sapphire Via a Novel Vapor-Liquid-Solid Process

Optical and Electrical Properties of Ga-Doped ZnO Nanowire Arrays on Conducting Substrates

Aligned Growth of ZnO Nanowires by Laser Ablation and Their Applications

Low-temperature Growth and Raman Scattering Study of Vertically Aligned ZnO Nanowires on Si Substrate

Controlled Growth of ZnO Nanowires by Nanoparticle-Assisted Laser Ablation Deposition

Growth of Large-Scale Vertically Aligned GaN Nanowires and Their Heterostructures with High Uniformity on SiOx by Catalyst-Free Molecular Beam Epitaxy

Controllable Growth of Highly Ordered ZnO Nanorod Arrays Via Inverted Self-Assembled Monolayer Template.

From Gan to Znga2o4 Through A Low-Temperature Process: Nanotube and Heterostructure Arrays

Lattice‐Symmetry‐Driven Epitaxy of Hierarchical GaN Nanotripods

Catalyst-free Synthesis of Well-Aligned ZnO Nanowires on In0.2Ga0.8N, GaN, and Al0.25Ga0.75N Substrates.

Controllable Heterogeneous Nucleation for Patterning High‐Quality Vertical and Horizontal ZnO Microstructures toward Photodetectors

Wet Chemical Approaches to Patterned Arrays of Well-Aligned ZnO Nanopillars Assisted by Monolayer Colloidal Crystals