Low Temperature Ordering of FePt Films by In-Situ Heating Deposition Plus Post Deposition Annealing

Y. S. Yu,Hai-Bo Li,W. L. Li,Mei Liu,Yu-Mei Zhang,W. D. Fei,D. J. Sellmyer

DOI: https://doi.org/10.1016/j.tsf.2009.11.009

IF: 2.1

2010-01-01

Thin Solid Films

Abstract:FePt thin films with 40nm thickness were prepared on thermally oxidized Si (001) substrates by dc magnetron sputtering at the nominal growth temperature 375°C. The effects of annealing on microstructure and magnetic properties of FePt thin films were investigated. The as-deposited FePt thin films show soft magnetic properties. After the as-deposited FePt thin films were annealed at various temperatures and furnace cooled, it is found that the ordering temperature of L10 FePt phase could be reduced to 350°C. For FePt thin films annealed at 350°C, the in-plane and out-of-plane coercivities of the films increased to 510 and 543kA/m, respectively, and the films had hard magnetic properties. A highly (001) orientation was obtained, when FePt thin films were annealed at 600°C. And the hysteresis loops of FePt thin films annealed at 600°C show out-of-plane magnetic anisotropy.