Technology of Micro Droplet Atomizers Based on Surface Acoustic Wave

Zhang Guan,Li Yigui,Zhang Junfeng,Yang Chunsheng,Liu Jingquan
DOI: https://doi.org/10.3969/j.issn.1671-4776.2009.12.004
2009-01-01
Abstract:The micro-atomizer with a copper interdigital transducer (IDT) was fabricated on a 127.8°YX-type LiNbO3 substrate by micro-processing technology.The droplet can be atomized by the micro-atomizer through the capillary wave induced by the surface acoustic wave(SAW).The cycle length of the IDT and the production process of the devices were described in detail.The actual center frequency of the atomizer was obtained by determination of the droplet speed,and the reasons of the difference between the theoretical frequency and the actual frequency were pointed out.The relationship between the diameter of the particle and the cycle length of the IDT was gotten.The results show that the diameter of the particle is 2.61 μm and the speed of the atomization is 1 μL/s with the applied frequency of 10.1 MHz and the power of 24 W.
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