Abstract:Atomic layer deposition (ALD) of Al2O3 using trimethylaluminum (TMA) and water on Pd nanoparticles (NPs) was studied by combining in situ quartz crystal microbalance (QCM) measurements, in situ quadrupole mass spectrometry (QMS), and transmission electron microscopy (TEM) with density functional theory (DFT) calculations. TEM images of the ALD Al2O3 overcoated Pd showed conformal Al2O3 films on the Pd NPs as expected for ALD. However, hydrogen detected by in situ QMS during the water pulses suggested that the ALD Al2O3 films on the Pd NPs were porous rather than being continuous coatings. Additional in situ QCM and QMS measurements indicated that Al2O3 ALD on Pd NPs proceeds by a self-poisoning, self-cleaning process. To evaluate this possibility, DFT calculations were performed on Pd(111) and Pd(211) as idealized Pd NP surfaces. These calculations determined that the TMA and water reactions are thermodynamically favored on the stepped Pd(211) surface, consistent with previous observations. Furthermore, the DFT studies identified methylaluminum (AlCH3*, where the asterisk designates a surface species) as the most stable intermediate on Pd surfaces following the TMA exposures, and that AlCH3* transforms into Al(OH)(3)* species during the subsequent water pulse. The gas phase products observed using in situ QMS support this TMA dissociation/hydration mechanism. Taken together, the DFT and experimental results suggest a process in which the Pd surface becomes poisoned by adsorbed CH3* species during the TMA exposures that prevent the formation of a complete monolayer of adsorbed Al species. During the subsequent H2O exposures, the Pd surface is cleaned of CH3* species, and the net result is a porous Al2O3 film. This porous structure can retain the catalytic activity of the Pd NPs by providing reagent gases with access to the Pd surface sites, suggesting a promising route to stabilize active Pd catalysts.

Preparation of well-defined samples of AlPdMn quasicrystals for surface studies

Surface Structures Of Approximant Phases In The Al-Pd-Mn System

Effect of Leaching on Surface Microstructure and Chemical Composition of Al-Based Quasicrystals

Atomic-Scale Structure Of The Fivefold Surface Of An Alpdmn Quasicrystal: A Quantitative X-Ray Photoelectron Diffraction Analysis

Preparation and Electro-Catalytic Activity of Nanoporous Palladium by Dealloying Rapidly-Quenched Al70Pd17Fe13 Quasicrystalline Alloy

Preparation and properties of Al62Cu25.5Fe12.5 quasicrystal powder as grinding material

Sound velocity and absorption measurements under high pressure using picosecond ultrasonics in diamond anvil cell. Application to the stability study of AlPdMn

Pioneering preparation and analysis of a clean surface on a microcrystal, mined by a focused ion beam

Interface Chemistry and Surface Morphology Evolution Study for InAs/Al2O3 Stacks Upon in Situ Ultrahigh Vacuum Annealing

Atomic structure of different surface terminations of polycrystalline ZnPd

Porous Alumina Protective Coatings on Palladium Nanoparticles by Self-Poisoned Atomic Layer Deposition

Porous Al63Cu25Fe12 Quasicrystals Covered with (Al11.5fe13.9cu19.7)o-54.9 Nanosheets

Nanoporous Palladium Synthesised by Dealloying Al72Pd20Mn8 Quasicrystal for Electrochemical Applications

Preparation of Layered Thin Film Samples for Angle-Resolved Photoemission Spectroscopy

Etching Growth under Surface Confinement: an Effective Strategy to Prepare Mesocrystalline Pd Nanocorolla

Steps and terraces at quasicrystal surfaces. Application of the 6d-polyhedral model to the analysis of STM images of i-AlPdMn

Formation enthalpies of Al-Mn-Pd and the structure of the $i$-AlMnPd quasicrystal

Shaping Surface of Palladium Nanospheres Through the Control of Reaction Parameters.

Resolving Precursor Deligation, Surface Species Evolution, and Nanoparticle Nucleation during Palladium Atomic Layer Deposition

A New Methodology for Quantifying the Surface Crystallography of Particles from their Tomographic Reconstruction: Application to Pd Nanoparticles Embedded in a Mesoporous Silica Shell

Direct in Situ Observation and Analysis of the Formation of Palladium Nanocrystals with High-Index Facets.