IC-CAM System for IC Posterior Processes

HUANG Hai,WU Bo,XIANG Cai-lan,MEN Yong-juan
DOI: https://doi.org/10.3969/j.issn.1000-7024.2007.11.059
2007-01-01
Abstract:In order to adapt to the manufacturing management characters of IC posterior processes,mainly including aging,selecting and testing processes,to improve their manufacturing efficiency,the new generation IC-CAM system focusing on the posterior processes of integrated circuit manufacturing is designed on the basis of the developed front end processes IC-CAM system.The structure of IC- CAM system for IC aging,selecting and testing processes,the design of major data structure,the event triggers which ensure the com- pletion and consistency of the data,and parts of the interface design are analyzed and discussed in details.The whole system has finished its installation and adjustment,and is used in the practical manufacturing with all the functions meeting the design specs,then the manu- facturing efficiency is improved.
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