Optimization on the self-aligned growth of carbon nanotube

Ying Wu,Yihong Ou,Junjie Bai,Xing Yang,Lijun Sun,Zhaoying Zhou
DOI: https://doi.org/10.1109/NEMS.2011.6017528
2011-01-01
Abstract:The principle of gas-flowing assistant growing of carbon nanotube is described in this paper. The effect of gas-flow was analyzed with numerical simulation, which can give some instruction for the self-aligned growth of carbon nanotube. Scanning electronic microscopy (SEM) images demonstrate that the self-aligned carbon nanotube can be realized by a gas-flowing CVD process and the distribution of carbon nanotube can be controlled by the gas-flowing rates. This research will provide a hopeful approach to the fabrication of CNT-based device.
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