The effect of H2/C2H2 ratio on the structure and tribological properties of carbon thin films prepared by PBII

J.X. Liao,Z. Tian,J. Xu,L. Jin,H.G. Yang

DOI: https://doi.org/10.1016/j.surfcoat.2006.05.038

2006-01-01

Abstract:Carbon thin films have been prepared on Si by plasma-based ion implantation (PBII) with H-2 and C2H2 mixed gases with various H-2/C2H2 ratios. The effect of the H-2/C2H2 ratio on the structure and tribological properties of the thin films has been investigated. XPS composition depth profile shows that a H-2/C2H2 ratio of about 1.0 corresponds to the just appearance of a carbon film growing on a C-Si transition layer showing gradually compositional and structural changes between the carbon film and the substrate, and above the ratio of 1.0 corresponds to no carbon film but a carbon-implanted layer. As the H-2/C2H2 ratio increases, the carbon film shows the rapidly decreasing thickness. Raman spectra show that the carbon films are diamond-like carbon (DLC) films rich in Sp(3) bonds carbons. A H-2/C2H2 ratio of approximately 0.1 corresponds to the maximal Sp(3)/Sp(2) ratio. The H-2/C2H2 ratio in the range of 0-0.3 corresponds to larger Sp(3)/Sp(2) ratio than the ratio of 0 (without H-2 additive). AFM morphologies exhibit that the DLC films are smooth and compact, and the H-2/C2H2 ratio of 0.08 corresponds to the smallest roughness. On die other hand, ball-on-disk sliding wear experiments show that the H-2/C2H2 ratio of 0-0.15 exhibit more significant improvement in tribological properties of the DLC films than the ratio of 0. In particular, at low sliding load of below 0.5 N the DLC films present more than 3 h-wear life and near to zero-wear rate. It is found that the H-2/C2H2 ratio of about 0.08 corresponds to the best tribological properties. The influences of sliding load, sliding frequency, film thickness and counter-ball materials on the tribological properties are also presented. (c) 2006 Elsevier B.V. All rights reserved.