The Principle and Application of Focused Electron/Ion Beam Technology

TIAN Wu-di,FANG Jing-yue,ZHANG Xue-ao
DOI: https://doi.org/10.3969/j.issn.1007-2934.2013.03.019
2013-01-01
Abstract:With the continuing development of nanotechnology to the breadth and depth,focused elec-tron/ion beam technology has been developed rapidly in recent years.As an important micro-nanofab-rication and characterization method,it attracted great attention of the maj ority of scientists.Thus,the dual-beam technology has been used in more and more applications in the latest research.This paper briefly described the application development,the structure and principle of the dual-beam system. What is more,the main application areas in last few years of the dual-beam technology were summa-rized,the trend of the future development of dual-beam technology was discussed.
What problem does this paper attempt to address?