Generic Criterion for Random Micro-Vibration of High-Tech Precision Facilities

ZHANG Wei,YING Zu-guang
DOI: https://doi.org/10.3969/j.issn.1006-1355.2010.01.112
2010-01-01
Abstract:The generic criterion for random micro-vibrations has a significant application in high-tech field,such as vibration-sensitive precision facilities.First of all,the mean-square-root velocity of random micro-vibration is introduced as a criterion.Different from the usual displacement and acceleration of vibration,this criterion describes both the statistical characteristics and centre-frequency effects of random disturbances.Then five micro-vibration levels are defined for disturbing environment according to various vibration sensitivities and requirements.And the corresponding up-limits and frequency spectrums of the mean-square-root velocities are given.Finally,application of the criterion,the mean-square-root velocity,is illustrated through an example of disturbing environment.
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