Characteristics of Direct Current Dielectric Barrier Discharge in a Micro Electrode System with Carbon Nanotubes

Wang Yuhua,Hou Zhongyu,Hui Bing,Xu Dong
DOI: https://doi.org/10.3969/j.issn.1671-4776.2011.01.006
2011-01-01
Abstract:The direct current dielectric barrier discharge(DBD)structure in a micro electrode system with carbon nanotube tips was researched.The electrode framework of the side-wall interdigital configuration with 0.5 of depth to width ratio was prepared by MEMS process.The multi-wall carbon nanotubes were patterned on the electrodes through electrophoresis deposition and covered with a magnetron sputtered silicon dioxide film.The fundamental characteristics of direct current discharges of the prepared DBD micro devices were examined in the atmospheric pressure.The results show that the discharge current of nA order can be detected when the applied DC voltage is only several volts,and the discharge current has obvious respond to human breath interferences and different gas species.The discharge inception voltage is less than 10 V,and DBD characteristic of suppressing the free increase of the current apparently is appeared.However,the duration time of the current decreasing is 102-103 s and much more than the DBD time in the normal atmospheric pressure,which exhibit the specific effect of the carbon nanotube tip.
What problem does this paper attempt to address?