The Synthesis of Photo-Benzocyclobutene

LI Yuanxun
2007-01-01
Abstract:The photo-Benxocyclobutene which is of good electric characteristic and low water absorpption has been the most perfect dielectric material in the micro-electronics field especially used in MCM.It can predigest the fabrication steps of appliances.In this paper,the development of photo-BCB and its application are introduced,and the structure and synthesis of two kinds of normal used photo-BCB are analyzed.A new type of designed Photo-BCB is also introduced in this paper.
What problem does this paper attempt to address?