Design of A Hybrid Integrated Microfiber Spectrometer

G Chen,ZY Wen,ZQ Wen,YS Pan,SL Huang
DOI: https://doi.org/10.1117/1.1582179
2003-01-01
Journal of Microlithography Microfabrication and Microsystems
Abstract:A scheme of a novel hybrid integrated microspectrometer is proposed, which greatly reduces the number of optical units used in the system and easily realizes the integration of the optical unit and the detecting array. At the same time, the effective area of the grating increases. One model of such device is fabricated. Its volume is about 60x40x40 mm and the volume can be further reduced. In the experiments, the spectrum signal of a Hg lamp is obtained. The results show that a resolution of 7 nm is achieved when a single mode fiber is used as the light input device. (C) 2003 Society of Photo-Optical Instrumentation Engineers.
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