CMOS-compatible reconstructive spectrometers with self-referencing integrated Fabry-Perot resonators
Chunyu You,Xing Li,Yuhang Hu,Ningge Huang,Yang Wang,Binmin Wu,Guobang Jiang,Jiayuan Huang,Ziyu Zhang,Bingxin Chen,Yue Wu,Junhan Liu,Xiangzhong Chen,Enming Song,Jizhai Cui,Peng Zhou,Zengfeng Di,Zhenghua An,Gaoshan Huang,Yongfeng Mei
DOI: https://doi.org/10.1073/pnas.2403950121
2024-08-13
Abstract:Miniaturized reconstructive spectrometers play a pivotal role in on-chip and portable devices, offering high-resolution spectral measurement through precalibrated spectral responses and AI-driven reconstruction. However, two key challenges persist for practical applications: artificial intervention in algorithm parameters and compatibility with complementary metal-oxide-semiconductor (CMOS) manufacturing. We present a cutting-edge miniaturized reconstructive spectrometer that incorporates a self-adaptive algorithm referenced with Fabry-Perot resonators, delivering precise spectral tests across the visible range. The spectrometers are fabricated with CMOS technology at the wafer scale, achieving a resolution of ~2.5 nm, an average wavelength deviation of ~0.27 nm, and a resolution-to-bandwidth ratio of ~0.46%. Our approach provides a path toward versatile and robust reconstructive miniaturized spectrometers and facilitates their commercialization.