Formation Mechanism for High-Surface-Area Anatase Titania Nanoparticles Prepared by Metalorganic Chemical Vapor Deposition

Yijun Sun,Takashi Egawa,Chunlin Shao,Liangying Zhang,Xi Yao
DOI: https://doi.org/10.1143/JJAP.43.3544
2004-01-01
Abstract:High-surface-area anatase titania nanoparticles are prepared by metalorganic chemical vapor deposition (MOCVD) using thermophoretic collection. Based on the dependence of X-ray linewidth (FWHM) on collection distance, a formation mechanism for the nanoparticles is proposed in which it is assumed that the relative changes in the grain size of and vacancy concentration in the nanoparticles are proportional to the velocity of the gas flow in the reactor. Three nondimensional equations that describe the dependence of the properties of the nanoparticles on collection distance are derived. This model explains well the effect of collection distance on X-ray linewidth, and it is not only in good agreement with XPS results but also consistent with TEM observations.
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