Simulation Of 3-Dof Multilayer Piezoelectric Micromanipulator

Chu Xiangcheng,Huang Jinding,Li Sixian,Li Longtu,Gui Zhilun
DOI: https://doi.org/10.3321/j.issn:1002-185x.2007.z1.147
2007-01-01
Rare Metal Materials and Engineering
Abstract:A novel model of 3-DOF multilayer PZT micromanipulator is promoted and simulated with FEA (finite element analysis) method. States under different applied voltages were discussed, including the motion along axis Z and the rotation along axis X and the bisector between X-Y. After analyzing the distribution of stress, some methods to improve the capability of the micromanipulator were proposed. Some quantificational analysis about the micromanipulator was carried out, and it is discovered that the relationship between the displacements of the probe and applied voltages is perfect linear. Comparing to the constant D defining the relationship of the displacements of the probe and applied voltages, it proves that the simulation is correct. The capability between the single-layer and multi-layer PZT was compared just only to show that the multi-layer PZT can reduce applied voltages producing the same displacement.
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