Abstract:With the complexity of semiconductor wafer fabs production, production schedules are released to shop floor and become an indispensable part of the factory. However, once a production schedule is made, evaluation of the schedule became the focus. As semiconductor wafer fabs is one of the most complex manufacturing production, research has traditionally focused on scheduling which considers only a few performance indices, ignoring a comprehensive systematic report about performance evaluation An evaluation system should show how well the results are from all angles if the schedules are performed and whether they satisfies the requirements of the management of a factory. After an introduction of the problem and a bibliography study, a performance evaluation system, which consists 4 short-term performance indices and long-term performance indices, is presented for scheduling semiconductor wafer fabs. The short-term performance indices aim to evaluate daily production plans, and include two types, i.e. product-related performances indices (Such as Work In Process (WIP), Movement and Step) and equipment-related performance indices (Such as Machine Utilization, Load, Queue and Rate of Bottleneck). The long-term performance indices help to analyze daily order release plans, and are composed of Average Cycle Time, Product Flow Parameter, On Time Delivery and Throughput Rate. And a real Performance-Evaluation System for scheduling Semiconductor wafer fabs was implemented to guide the actual production in semiconductor wafer industry. This developed system has been well applied in factory.

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