Studies of Key Issues in Simulation and Modeling of Semiconductor Production Line--Based on Simul8 Software

Fang Ming,Qiao Fei,Xu Xiaohong
DOI: https://doi.org/10.3321/j.issn:1002-8331.2006.01.058
2006-01-01
Abstract:In order to meet the performance and reality request for simulation and modeling of semiconductor production line,a strategy to distinguish static inter-relationship process region and dynamic inter-relationship process region is proposed.And their realization based on Simul8 are further explored respectively.Meanwhile,the problem of step processing time and translation time is also analyzed and solved successfully.Simulation result shows that both of the performance and reality of simulation can be improved.
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