Impact of Acceleration Voltage on FESEM Images

ZHOU Ying,WANG Hu,WU Wei,LIU Zi-wei,LIN Chu-cheng,HUA Jia-jie
2012-01-01
Abstract:Field emission scanning electron microscopy(FESEM) which can not only characterize the material microstructure,but also get the chemical composition and structure information of the micro region qualitatively and quantitatively is currently widely used in field of material microstructure analysis at home and abroad.Acceleration voltage affects the image quality greatly.When the acceleration voltage is low,the incident electron energy is low and the spatial resolution is improved.This can enhance the amount of information on the sample surface,reduce the charge phenomenon,and reduce the damage of samples.When the acceleration voltage is high,the incident electron energy is high and the image resolution is improved.This helps to ignore the sample surface organic pollutant information and show the composition information of the sample.Therefore,in practice,according to the sample characteristics and testing requirements,it necessary that the appropriate acceleration voltage be chosen flexibly to improve the quality of SEM images.
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