Research on the Influence of Reactive Gas CF4/SF6 Upon the Temperature of Atmospheric Pressure Plasma Jet

王东方,金会良,金江,王波
DOI: https://doi.org/10.3969/j.issn.1003-5451.2011.05.009
2011-01-01
Abstract:To research the rule of reactive gas CF4/SF6 and their concentration upon the temperature of the atmospheric pressure plasma jet,the infrared camera was used to record the temperature of the atmospheric pressure plasma jet.The experiment indicates that when the input power is 260W,for the gas CF4,with the increasing concentration of reactive gas,the temperature of the atmospheric pressure plasma jet firstly rises,and then drops;for the gas SF6,the temperature of the atmospheric pressure plasma jet goes down with the increasing concentration of reactive gas;at the same condition,the temperature of the atmospheric pressure plasma jet with SF6 is higher than with the CF4.
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