Management and maintenance of semiconductor processing equipment

Li Yue
DOI: https://doi.org/10.3969/j.issn.1672-7916.2012.01.018
2012-01-01
Abstract:The areas of operation management,technology management and technical performance maintenance for semiconductor processing equipment are provided.The key period including the system inspection before shipment,move in and installation,start-up,within warranty and without warranty are covered.The obligation and right of both system vendor and customer,main task activities,technical requirement and related operation management are introduced.
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