Gas-sensing properties of PdO-modified SnO2–Fe2O3 double-layer thin-film sensor prepared by PECVD technique

M.S Tong,G.R Dai,D.S Gao
DOI: https://doi.org/10.1016/S0042-207X(00)00395-X
IF: 4
2000-01-01
Vacuum
Abstract:The SnO2-Fe2O3 double-layer thin films have been fabricated onto silicon and ceramic substrates by using plasma-enhanced chemical vapour deposition (PECVD) technique. A small amount of PdO is coated over the surface of SnO2 thin films to improve their gas-sensing properties to CO. The surface morphologies and the structures of the oxide thin films have been investigated by means of X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) methods. Gas-sensing properties of the PdO-modified SnO2-Fe2O3 double-layer thin film and its sensitive mechanism are discussed herein. (C) 2000 Elsevier Science Ltd. All rights reserved.
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