Abstract:A novel three-dimensional (3D) holographic femtosecond laser parallel processing method with the fractional Fourier transform was proposed for arbitrary microstructures inside glass materials. In this system, the femtosecond laser is modulated by the spatial light modulator and then passes through the objective lens to achieve 3D microstructures without additional optical or mechanical motion support. Relying on the advantages of the fractional Fourier transform, a new expansion in laser 3D processing was realized. A 3D distributed microstructure array was successfully etched using a single irradiation, and a spatially distributed seven-layer wire microstructure was prepared through a single linear scan, in which the interlayer interference can be avoided by optimizing the fractional order. The analysis of computational and experimental results shows that the fractional holographic processing of 3D complex microstructures is an excellent approach for controlling uniformity, energy output and positional accuracy. The holographic 3D laser parallel processing method with high speed and high resolution has shown considerable potential in precision manufacturing, and it can be believed that it will play a significant role in the advancement of high-end technology in the future.

Controllable fabrication of periodic hexagon lattice on glass by interference of three replicas split from single femtosecond laser pulse

Multi-photon Fabrication of Two-Dimensional Periodic Structure by Three Interfered Femtosecond Laser Pulses on the Surface of the Silica Glass

Formation Of Two-Dimensional Periodic Microstructures By A Single Shot Of Three Interfered Femtosecond Laser Pulses On The Surface Of Silica Glass

Controllable Grating Fabrication By Three Interfering Replicas Of Single Femtosecond Laser Pulse

Two-dimensional ‘hat-scratch’ periodic structures induced by a single femtosecond laser pulse on silica glass

Periodic Microstructures Induced by Interfered Femtosecond Laser Pulses

Single-step maskless nano-lithography on glass by femtosecond laser processing

Femtosecond laser-induced large area of periodic structures on chalcogenide glass via twice laser direct-writing scanning process

Self-Assembled Quasi-Periodic Voids in Glass Induced by A Tightly Focused Femtosecond Laser

Maskless Laser Nano-Lithography of Glass Through Sequential Activation of Multi-Threshold Ablation

Taper Array in Silica Glass for Beam Splitting

Fabrication Of Two-Dimensional Periodic Nanostructures By Two-Beam Interference Of Femtosecond Pulses

Three-dimensional Nanostructuring of Transparent Materials by the Femtosecond Laser Irradiation

Investigation on Femtosecond Laser-Assisted Microfabrication in Silica Glasses

Three-dimensional Photoprecipitation of Oriented LiNbO3-like Crystals in Silica-Based Glass with Femtosecond Laser Irradiation.

Aberration-free three dimensional micromachining in glass with spatiotemporally shaped femtosecond laser pulses

Control of Femtosecond Multi-Filamentation in Glass by Designable Patterned Optical Fields

Metal Nanoparticle Precipitation In Periodic Arrays In Au2o-Doped Glass By Two Interfered Femtosecond Laser Pulses

3D periodic nano-structures in glass irradiated by ultrashort light pulses

Three-dimensional holographic femtosecond laser parallel processing method with the fractional Fourier transform for glass substrates

Experimental Realization of a High Precision Tunable Hexagonal Optical Lattice