Morphology Control of Thin LiCoO2 Films Fabricated Using the Electrostatic Spray Deposition (ESD) Technique

CH Chen,EM Kelder,PJJM vanderPut,J Schoonman
DOI: https://doi.org/10.1039/jm9960600765
1996-01-01
Journal of Materials Chemistry
Abstract:Electrostatic spray deposition (ESD) is a technique recently developed for the fabrication of inorganic thin films. Several process steps involved in an ESD process are overviewed. A variety of surface morphologies of LiCoO2 thin layers fabricated by this technique are presented, indicating correlations between the morphologies and deposition conditions.
What problem does this paper attempt to address?