Research development of surface acoustic wave sensors for NO2 gas detection

Mo-lin Qin,Yong Pan,Bing-qing Cao,Jian-jun Zhao,Dong-mei Li
DOI: https://doi.org/10.3969/j.issn.1008-2298.2010.02.004
2010-01-01
Chemical Sensors
Abstract:NO2 pollutes the air seriously and is harmful to man's health.It is urgent and important to develop sensors for NO2 detection.Surface acoustic wave gas sensors have been studied widely because they have advantages of small size,fast response,high sensitivity,good stability and low cost.The principle of SAW gas sensors and the mechanism of reaction of sensitive film and NO2 gas is introduced.Two sorts of structure of SAW-NO2 sensor and several sensitive film materials are reviewed.The development trends of SAW-NO2 sensors are discussed.
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