Research Progress of MEMS Micro Heat Pipes

Qu Jian,Wang Qian,Wu Huiying
DOI: https://doi.org/10.3969/j.issn.1671-4776.2012.03.006
2012-01-01
Abstract:The MEMS micro heat pipe,as a novel heat pipe technology,is considered as one of the most promising choices for thermal control applications in microelectronics,photovoltaic cells,infrared detectors,laser diodes,etc.The basic principle and characteristics of MEMS micro heat pipes are firstly introduced,and the development history of which is reviewed briefly.Then,the fabrication method,channel size,and overall structure feature are compared with those of a traditional heat pipe,which account for the advantages of a MEMS micro heat pipe.Based on the discussion above,the progress of the micro grooved heat pipe,micro capillary pumped loop,micro loop heat pipe,micro pulsating heat pipe and other different types of the MEMS micro heat pipes are thoroughly reviewed.Finally,the development tendency and challenges impacting on real applications of MEMS micro heat pipes are prospected,and it is pointed out that the fabrication cost reduction,working fluid filling and packaging optimization,testing method improvement,as well as operational mechanism investigation are identified as major issues for the future research.
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