New generation nuclear microprobe systems

David N. Jamieson,William L. Griffin,Gary Cripps,Roland Szymanski
DOI: https://doi.org/10.1016/S0168-583X(01)00547-X
2001-01-01
Abstract:Over the past 20 years, the minimum probe size for nuclear microscopy has stayed around 1 μm with only a few groups reporting a sub-micron probe size around 0.5 μm. No breakthroughs in nuclear microprobe design have been forthcoming to produce dramatic improvements in spatial resolution. The difficulties of breaking the constraints that are preventing reduction of the probe size have been well recognised in the past. Over the past 5 years it has become clear that some of these constraints may not be as limiting as first thought. For example, chromatic aberration clearly is not as significant as implied from first-order ion optics calculations. This paper reviews the constraints in view of the increased understanding of the past 5 years and looks at several new approaches, presently being evaluated in Melbourne and elsewhere, on how to make progress. These approaches include modified RF ion sources for improved beam brightness and exploitation of relaxed constraints on some lens aberrations allowing the use of high demagnification probe forming lens systems.
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