Fabrication of TiO2 Nanotube Arrays on Si Substrates

Ming-jie YANG,Wei LIU,Jia-Lin SUN
DOI: https://doi.org/10.13228/j.boyuan.issn1005-8192.2012.05.007
2012-01-01
Abstract:Titanium films deposited on Si substrates by magnetron sputtering were used instead of titanium foils in the traditional anodizing process.Highly-ordered TiO2 nanotube arrays were fabricated on Si substrates via anodization in ethylene glycol electrolyte and glycerol electrolyte,respectively.This method was compatible with silicon integration technology,which was in favor of the design and manufacture of micro-nano devices based on TiO2 nanotube arrays.
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