Abstract:Photonic crystals are utilized in many noteworthy applications like optical communications, light flow control, and quantum optics. Photonic crystal with nanoscale structure is important for the manipulation of light propagation in visible and near-infrared range. Herein, we propose a novel multi beam lithography method to fabricate photonic crystal with nanoscale structure without cracking. Using multi-beam ultrafast laser processing and etching, parallel channels with subwavelength gap are obtained in yttrium aluminum garnet crystal. Combining optical simulation based on Debye diffraction, we experimentally show the gap width of parallel channels can be controlled at nanoscale by changing phase holograms. With the superimposed phase hologram designing, functional structures of complicated channel arrays distribution can be created in crystal. Optical gratings of different periods are fabricated, which can diffract incident light in particular ways. This approach can efficiently manufacture nanostructures with controllable gap, and offer an alternative to the fabrication of complex photonic crystal for integrated photonics applications.

Photonic Bandgap Properties of Atom-Lattice Photonic Crystals in Polymer

&Lt;title>formation of Photonic Crystals by Femtosecond Laser Microfabrication</title>

Inlayed “Atom-Like Three-Dimensional Photonic Crystal Structures Created with Femtosecond Laser Microfabrication

Arbitrary-lattice photonic crystals created by multiphoton microfabrication.

Photonic Crystal Structures with Submicrometer Spatial Resolution Achieved by High-Power Femtosecond Laser-Induced Photopolymerization

Characteristics Modeling of Photonic Crystal by Using Numerical Techniques

Improvement of the Photonic Bandgap in Three-Dimensional Diamond Lattice Microstructures Obtained by Two-Photon Polymerization

Log-Pile Photonic Crystal Fabricated by Two-Photon Photopolymerization

Femtosecond Laser Micro-Fabrication for Tailoring Photonic Crystals in Resins and Silica

Photonic Lattices Achieved with High-Power Femtosecond Laser Microexplosion in Transparent Solid Materials

Photonic Band-Gap Engineering of Quasiperiodic Photonic Crystals

Photonic Bandgap of Gradient Quasidiamond Lattice Photonic Crystal

Photonic Band Gap Structure and Its Potential Application

Three-Dimensional Photonic Crystal Structures Achieved with Two-Photon-Absorption Photopolymerization of Resin

Submicron Diamond-Lattice Photonic Crystals Produced by Two-Photon Laser Nanofabrication

2-Photon Microfabrication of Log-Pile Photonic Crystal and Theoretical Analysis on Its Characters

The ultra-wide band gap property induced by lattice period gradually changing in three-dimensional photonic crystals

Nanoscale multi-beam lithography of photonic crystals with ultrafast laser

Photonic Crystals: A New Manmade Band Gap Material

Engineering Dispersive Properties of Polymer-Based Photonic Crystals

Photonic crystal for graphene plasmons