Abstract:Aim Recent progress in research on ZnO based nanometer thin film materials of diluted magnetic semiconductor was reviewed to reveal some problems existing in the research and analyse its prospect on this basis.Methods Based on 58 related literatures,the structure and doping system of ZnO based nanometer thin film materials of diluted magnetic semiconductor was summarized and compared.Result It was pointed out that the problems existed in the research from such aspects as the method for preparation of the ZnO based nanometer thin film materials of diluted magnetic semiconductor and other doping elements.Namely,1)it was difficult to synthetise high-quality uniform doped samples;2)there was not a unified final conclusion about source of magnetic properties;3)the microcosmic factors need further study which influence the essence of magnetic property;4)the repetition rates of the prepared samples were not high.Conclusion The diluted magnetic semiconductors with room-temperature ferromagnetism,which are magnetic and electronic devices that can utilize simultaneously the spin of carrier and degrees of freedom of charge,are the basis of the spintronics application.Although the research has made considerable development,the technology for preparing ZnO based nanometer thin film materials of diluted magnetic semiconductor is far from maturity and needs to be studied further.

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